GERLING APPLIED ENGINEERING, INC.
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Advanced Microwave Heating Technology


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For more product
information, please
call, fax or email
us with your
questions at

Voice:
209-527-8960

Fax:
209-527-5385

Email:
sales1@2450mhz.com

SEMICONDUCTOR OEM PRODUCTS

The products listed below are specially designed for use in semiconductor fabrication equipment ("tools") manufactured by GaSonics (Novellus), Axcelis, Applied Materials and other OEMs. Although these products can be used for other applications, GAE offers a complete line of standard products that may be more suitable and cost effective for general purposes. Please visit the Products page and scroll through the list of product groups, and feel free to contact GAE for assistance with product selection.

Microwave Generators

GAE P/N Description Replaces Used On Magnetron
912419 1.25 kW OEM Mw Generator
(Front Access) *
C12935
94-1104
L-3510 910443
(C12139)
913682 1.25 kW Mw Generator, PEP
(Front Access) *
C13170
94-2618
PEP 910443
(C12139)
913714 1.25 kW HV Power Supply
(Front Access) *
C12932-2
61-0052
A-3010 n/a
913715 1.8 kW HV Power Supply
(Front Access) *
D13765
61-2332
Iridia n/a

* Recommended for all new tools and field replacements.

Magnetrons

GAE P/N Power Used In Equiv. P/N Cooling Freq
911465 1.45 kW 95-3014 60-2011
NL10254-16
Water 2.45
GHz
911465-1 1.45 kW 95-2665 95-0502
NL10254-6
911550 1.45 kW A-3000, PRSP NL10254-4
913171 1.45 kW A-1000 A95-45-01-E
MB2658A-170FZ 1.5 kW SXRHC
0190-09769
DX-582A
910443 1.9 kW C12935 C12139
73797-06
NL10250-9
911513 1.9 kW Iridia 60-2025
NL10250-17
912322 1.9 kW Axcelis 319371
NL10250-20
911147 2 kW PEP+ 60-2043
05-162425-00
912781 2 kW Matrix 0995-99314
NL10250-24
MB2658A-170FZ 2.5 kW SXRHC
0920-01072
DX-582A
911297 3 kW SmartPowerTM C13733
C13824
910904 3.5 kW D13449 AG9131A
010226 6 kW Various YJ1600
E3327

Waveguide Components

GAE P/N Description Equiv. P/N Used On
912224 Offset Waveguide with Coupler n/a L-3510
912803-2 Precision 3-Stub Tuner, CPR284 n/a L-3510
PEP, PEP+
910303 Dual Coupler E-Bend, CPR284 94-3114 PEP+
910406 Dummy Load with Coupler, CPR284 60-2032 PEP+
913709-1 Flex Waveguide, Left Side, with Clamp 94-2623 PEP
913709-2 Flex Waveguide, Right Side, with Clamp 16-282340-00 PEP
910917 Dual Directional Coupler, WR340 60-2022 Iridia
914062 Taper Transition, WR340 to WR284 94-3055 Iridia

Spare Parts and Accessories

GAE P/N Description Equiv. P/N Used On
910923 Control PCB Assy,
Top Access
C12132
73797-04
C13170 (PEP)
D13765 (Iridia)
910923-1 Control PCB Assy,
Side/Front Access
C12132-1
73797-23
C12935 (L-3510)912419 (L-3510)
911214 SCR Power Board Assy C12294
73797-05
All above
910441 Plate Transformer C12254
73797-20
912419 (L-3510)
C12935 (L-3510)
C13170 (PEP)
910442 Filament Transformer C12872
60-1016
All above
910575 Plate Transformer C13089
73797-22
C12932-2 (A-3010)
913714 (A-3010)
040101 Crystal Detector Diode, Type N Male 35-2491 Various
350101 Flange Clamp, Quick Release 61-176491-00 Various
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